108 Auto/SE Sputter Coater
for applications where the coating thickness must have a very high degree of uniformity
The 108 Auto/SE Sputter Coater is the Special Equipment version of the Automatic Coater Product No. 7002. The 108 Auto/SE is intended for use in applications where the coating thickness must have a very high degree of uniformity. The chamber size has been increased to 150mm diameter to accommodate the Rotary-Planetary-Tilting Stage developed for the 208HR High Resolution Coater model. |
The 108 Auto/SE Sputter Coater can be fitted with an
optional MTM-10 or MTM-20 Thickness Measurement System and the optional
Rotary-Planetary-Tilting or Rotary-Tilting Stage to accommodate multiple or large samples
Ordering Information
PROD # |
DESCCIPTION |
UNIT |
7008 |
108 Auto/SE Sputter Coater, 115VAC* |
each |
7008-220 |
108 Auto/SE Sputter Coater, 220VAC* |
each |
*The 108 Auto SE Sputter Coater includes: 91110 Gold Target; 7021 Specimen Mount Stage for 12 pin mounts; Telescopic Top Plate Support; 150mm dia. Chamber; Manual Target Shutter; and Operating Instructions
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