Disk or Annular Sputter Targets for Sputter Coaters

Disk Targets

High purity disk type sputter targets for a wide variety of sputter or ion coater brands: PELCO^®, Cressington, Agar, Bal-Tec, Bio-Rad, Denton, Edwards, Emitech, Emscope, Gatan, ISI, JEOL, LEICA, Polaron, Quorum, and SPI. The disc or foil type sputter targets are available in 60, 57, 54, 50 and 19mm diameter. Most of the disk type targets are clamped to the target holder by a target clamping ring; simply unscrew the clamping ring and change the target.

Useful Information For Selecting SEM Sputter Target Material

The target diameter can be selected for sputter coater models listed below.

Ø60mm (2 3/8″) Sputter Targets

Ø57mm (2 1/4″) Sputter Targets

Ø54mm (2 1/8″) Sputter Targets

Ø50mm (2″) Sputter Targets

Ø38mm (1 1/2″) Sputter Targets

Ø19mm (3/4″) Sputter Targets

Annular Targets

High purity annular targets (with a hole in the center) for Polaron sputter coaters. The annular targets are fabricated on an aluminum target ring and are supplied as complete assemblies with sputter material and aluminum support ring. Available with either pure gold or gold/palladium (60/40% alloy) with a thickness of 0.1mm (0.004”) on an aluminum support ring: 82mm O.D. with 60mm I.D for Polaron sputter coaters.

Bonded Target Information

Some sputter coater models have the targets bonded to the target head with a conductive bonding material such as silver paint. In this case the target has to be removed from the target head, the surface needs to be cleaned and the new target can be easily bonded to the flat surface using silver paint. Exceptions are the Fullam Effa Coater and the Fullam EMS-76 Coater; they use indium (#29-49) bonded targets;

Disk Type Sputter Targets Selection Table

Manufacturer	Model	60mm 2 3/8″	57mm 2 1/4″	54mm 2 1/8″	50mm 2″	38mm 1 1/2″	19mm 3/4″
AGAR	Manual type sputter coater		X
AGAR	Automatic sputter coater		X
Bal-Tec	SCD 005			X
Bal-Tec	SCD 040			X
Bal-Tec	SCD 050			X
Bal-Tec	SCD 500			X
Bal-Tec	MED 10			X
Bal-Tec	MED 20			X
Bio-Rad	SC 5200		X
Bio-Rad	SC 502		X
Cressington	108 manual		X
Cressington	108 auto		X
Cressington	108/auto/SE		X
Cressington	208HR		X
Cressington	308HR					X
Cressington	328UHR					X
Denton	DESK II	X
Denton	DESK III	X
Denton	DESK IV	X
Denton	DESK V	X
Edwards	150 B	X
Edwards	Scancoat	X
Emitech	SC7620/SC7610		X
Emitech	K500X/K550X/K650X	X
Emitech	K575/K575XD/Q150		X
Emscope/Polaron	SC 502		X
Fullam	EffaCoater				X
Fullam	EMS-76				X
Gatan	681 Ion Beam Coater						X
Gatan	682 PECS Ion Beam Coater						X
Gatan	685 PECS II System						X
ISI	ISI 5400		X
JEOL	JFC-1200		X
JEOL	JFC-1300		X
JEOL	JFC-1400		X
JEOL	JFC-1600		X
JEOL	JFC-2300HR		X
LEICA	ACE 200			X
LEICA	ACE 600			X
LEICA	EM MED 020			X
LEICA	EM SCD 005			X
LEICA	EM SCD 050			X
LEICA	EM SCD 500			X
PELCO^®	Model 3		X
PELCO^®	SC4		X
PELCO^®	SC5		X
PELCO^®	SC6		X
PELCO^®	SC7		X
Polaron*	E5000		X
Polaron*	E5200		X
Polaron*	E5400		X
Polaron*	SC7610/SC7620		X
Quorum	Q150		X
SPI	SPI-Module™		X
SPI	SPI Super™		X